摘要Using acoustic microscopy at higher frequency, we show the velocity evolutions of surface acoustic waves, in particular Rayleigh waves that depend on porosity for a mesoporous silicon layer. The velocities are obtained from different V(z) curves, which are determined experimentally at a frequency of 600 MHz. The analysis of V(z) data yields attenuation that is directly dependent on porosity. On the other hand, αN attenuation has been modeled and allows us to investigate its influence on the velocity VR of the propagation for Rayleigh waves.
Abstract：Using acoustic microscopy at higher frequency, we show the velocity evolutions of surface acoustic waves, in particular Rayleigh waves that depend on porosity for a mesoporous silicon layer. The velocities are obtained from different V(z) curves, which are determined experimentally at a frequency of 600 MHz. The analysis of V(z) data yields attenuation that is directly dependent on porosity. On the other hand, αN attenuation has been modeled and allows us to investigate its influence on the velocity VR of the propagation for Rayleigh waves.
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2012, Vol. 29 
