Preparation of a Waveguide Array in Flame Hydrolysis Deposited
GeO2 -SiO2 Glasses by Excimer-Laser Irradiation
WU Yuan-Da, XING Hua, ZHANG Le-Tian, LI Ai-Wu, YU Yong-Sen, ZHANG Yu-Shu
Department of Electronics Engineering, Jilin University,
Changchun 130023
Preparation of a Waveguide Array in Flame Hydrolysis Deposited
GeO2 -SiO2 Glasses by Excimer-Laser Irradiation
WU Yuan-Da;XING Hua;ZHANG Le-Tian;LI Ai-Wu;YU Yong-Sen;ZHANG Yu-Shu
Department of Electronics Engineering, Jilin University,
Changchun 130023
关键词 ：
78.20.Ci ,
78.20.Ek
Abstract ： SiO2 glass films doped with GeO2 were prepared by the flame hydrolysis deposition method, then annealed at 1200°C. After exposure to high pressure hydrogen, the as-deposited films were irradiated with excimer laser pulses operated at 248 nm. The induced refractive index change (the growth of index change was 0.33%) was measured by a spectroscopic ellipsometer. A waveguide array has been written in the film by irradiation through a phase mask.
Key words ：
78.20.Ci
78.20.Ek
出版日期: 2002-12-01
:
78.20.Ci
(Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))
78.20.Ek
(Optical activity)
引用本文:
WU Yuan-Da;XING Hua;ZHANG Le-Tian;LI Ai-Wu;YU Yong-Sen;ZHANG Yu-Shu. Preparation of a Waveguide Array in Flame Hydrolysis Deposited
GeO2 -SiO2 Glasses by Excimer-Laser Irradiation[J]. 中国物理快报, 2002, 19(12): 1877-1879.
2 -SiO2 Glasses by Excimer-Laser Irradiation. Chin. Phys. Lett., 2002, 19(12): 1877-1879.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2002/V19/I12/1877
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2002, Vol. 19 
