Research of Plasma Characteristics of the Radio-Frequency Discharge in O2 and Its Mixtures
ZHANG Xue-Ling1, WANG Xin-Bing1, LI Guo-Fu2
1Wuhan National Laboratory for Optoelectronics, Institute of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, Wuhan 4300742Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023
Research of Plasma Characteristics of the Radio-Frequency Discharge in O2 and Its Mixtures
ZHANG Xue-Ling1, WANG Xin-Bing1, LI Guo-Fu2
1Wuhan National Laboratory for Optoelectronics, Institute of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, Wuhan 4300742Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023
摘要Electron mean energy and the effects of gas mixture are studied theoretically and experimentally. The electron mean energy in O2 and its mixtures is obtained by solving Boltzmann's equation. The experiments of the Langmuir probe system and spectral analysis are carried out. It is shown that electron temperature goes down with the increasing pressure, narrowing pulse width and the addition of helium and argon. According to the intensity of oxygen atom at 777.19nm, xenon is more effective in inhibition of O2 decomposition than helium and argon.
Abstract：Electron mean energy and the effects of gas mixture are studied theoretically and experimentally. The electron mean energy in O2 and its mixtures is obtained by solving Boltzmann's equation. The experiments of the Langmuir probe system and spectral analysis are carried out. It is shown that electron temperature goes down with the increasing pressure, narrowing pulse width and the addition of helium and argon. According to the intensity of oxygen atom at 777.19nm, xenon is more effective in inhibition of O2 decomposition than helium and argon.
(Plasma diagnostic techniques and instrumentation)
引用本文:
ZHANG Xue-Ling;WANG Xin-Bing;LI Guo-Fu. Research of Plasma Characteristics of the Radio-Frequency Discharge in O2 and Its Mixtures[J]. 中国物理快报, 2009, 26(2): 24204-024204.
ZHANG Xue-Ling, WANG Xin-Bing, LI Guo-Fu. Research of Plasma Characteristics of the Radio-Frequency Discharge in O2 and Its Mixtures. Chin. Phys. Lett., 2009, 26(2): 24204-024204.
[1] Carroll D L, Verdeyen J T, King D M, Zimmerman J W,Laystrom J K, Woodard B S, Richardson N, Kittell K, Kushner M J andSolomon W C 2004 Appl. Phys. Lett. 85 1320 [2] Carroll D L, Verdeyen J T, King D M, Zimmerman J, LaystromJ, Woodard B, Benavides G, Kittell K, Stafford D, Kushner M J andSolomon W C 2005 Appl. Phys. Lett. 86 111104 [3] Rawlins W T, Lee S, Kessler W J and Davis S J 2005 Appl. Phys. Lett. 86 051105 [4] Verdeyen J T, Carroll D L, King D M, Laystrom J K,Benavides G F, Zimmerman J W, Woodard B S and Solomon W C 2006 Appl. Phys. Lett. 89 101115 [5] Hicks A, Tirupathi S, Jiang N, Utkin Yu, Lempert W R, RichJ W and Adamovich I V 2007 J. Phys. D: Appl. Phys. 401408 [6] Lowke J J, Phelps A V and Irwin B W 1973 J. Appl.Phys. 44 4664 [7] Baker C J, Hall D R and Davies A R 1984 J. Phys. D:Appl. Phys. 17 1597 [8] Rockwood S D 1973 Phys. Rev. A 8 2348 [9] Napartovich A P, Deryugin A A and Kochetov I V 2001 J. Phys. D: Appl. Phys. 34 1827 [10] Zimmerman J W, Skorski L W, Solomon W C, Kushner M J,Verdeyen J T and Carroll D L 2003 SPIE 4971 81 [11] Wang H Y, Li G F, Duo L P, Sang F T, Wang X B and Jing YQ 2007 High Power Laser and Particle Beams 19 12 (inChinese)
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