2009, Vol. 26(2): 24204-024204 DOI: 10.1088/0256-307X/26/2/024204 | ||
Research of Plasma Characteristics of the Radio-Frequency Discharge in O2 and Its Mixtures | ||
ZHANG Xue-Ling1, WANG Xin-Bing1, LI Guo-Fu2 | ||
1Wuhan National Laboratory for Optoelectronics, Institute of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, Wuhan 4300742Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023 | ||
收稿日期 2008-09-01 修回日期 1900-01-01 | ||
Supporting info | ||
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