2009, Vol. 26(2): 24204-024204    DOI: 10.1088/0256-307X/26/2/024204
Research of Plasma Characteristics of the Radio-Frequency Discharge in O2 and Its Mixtures
ZHANG Xue-Ling1, WANG Xin-Bing1, LI Guo-Fu2
1Wuhan National Laboratory for Optoelectronics, Institute of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, Wuhan 4300742Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023
收稿日期 2008-09-01  修回日期 1900-01-01
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