Low-Power Super-resolution Readout with Antimony Bismuth Alloy Film as Mask layer
JIANG Lai-Xin1, WU Yi-Qun1,2, WANG Yang1, WEI Jing-Song1,GAN Fu-Xi1
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002Lab of Functional Materials, School of Chemistry and Materials Science, Heilongjiang University, Harbin 150080
Low-Power Super-resolution Readout with Antimony Bismuth Alloy Film as Mask layer
JIANG Lai-Xin1, WU Yi-Qun1,2, WANG Yang1, WEI Jing-Song1,GAN Fu-Xi1
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002Lab of Functional Materials, School of Chemistry and Materials Science, Heilongjiang University, Harbin 150080
摘要Sb-Bi alloy films are proposed as a new kind of super-resolution mask layer with low readout threshold power. Using the Sb-Bi alloy film as a mask layer and SiN as a protective layer in a read-only memory disc, the super-resolution pits with diameters of 380nm are read out by a dynamic setup, the laser wavelength is 780nm and the numerical aperture of pickup lens is 0.45. The effects of the Sb-Bi thin film thickness, laser readout power and disc rotating velocity on the readout signal are investigated. The results show that the threshold laser power of super-resolution readout of the Sb-Bi mask layer is about 0.5mW, and the corresponding carrier-to-noise ratio is about 20dB at the film thickness of 50nm. The super-resolution mechanism of the Sb-Bi alloy mask layer is discussed based on its temperature dependence of reflection.
Abstract：Sb-Bi alloy films are proposed as a new kind of super-resolution mask layer with low readout threshold power. Using the Sb-Bi alloy film as a mask layer and SiN as a protective layer in a read-only memory disc, the super-resolution pits with diameters of 380nm are read out by a dynamic setup, the laser wavelength is 780nm and the numerical aperture of pickup lens is 0.45. The effects of the Sb-Bi thin film thickness, laser readout power and disc rotating velocity on the readout signal are investigated. The results show that the threshold laser power of super-resolution readout of the Sb-Bi mask layer is about 0.5mW, and the corresponding carrier-to-noise ratio is about 20dB at the film thickness of 50nm. The super-resolution mechanism of the Sb-Bi alloy mask layer is discussed based on its temperature dependence of reflection.
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2009, Vol. 26 
