1CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 2300272Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
Analysis of Optical Readout Sensitivity for Uncooled Infrared Detector
1CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 2300272Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
摘要An optical readout uncooled infrared detector, employing a substrate-free focal plane array with pitch size 60μm, is established. The reflector deformation induced by the stress mismatching of the bi-layer structure is discussed and, in turn, a universal solution to determine both the optical readout sensitivity and the optimal filter position is found. By applying this solution, the optical readout sensitivity for the ideal plane reflector could theoretically increase by 80% as compared with the conventional operation, and the sensitivity loss caused by the reflector deformation can also be reduced to a reasonable level.
Abstract：An optical readout uncooled infrared detector, employing a substrate-free focal plane array with pitch size 60μm, is established. The reflector deformation induced by the stress mismatching of the bi-layer structure is discussed and, in turn, a universal solution to determine both the optical readout sensitivity and the optimal filter position is found. By applying this solution, the optical readout sensitivity for the ideal plane reflector could theoretically increase by 80% as compared with the conventional operation, and the sensitivity loss caused by the reflector deformation can also be reduced to a reasonable level.
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2009, Vol. 26 
