Accurate Phase Shift Extraction for Generalized Phase-Shifting Interferometry
XU Xian-Feng1, CAI Lu-Zhong2, WANG Yu-Rong2, LI Dai-Lin1
1College of Physics Science and Technology, China University of Petroleum (East China), Dongying 2570612Department of Optics, Shandong University, Jinan 250100
Accurate Phase Shift Extraction for Generalized Phase-Shifting Interferometry
XU Xian-Feng1, CAI Lu-Zhong2, WANG Yu-Rong2, LI Dai-Lin1
1College of Physics Science and Technology, China University of Petroleum (East China), Dongying 2570612Department of Optics, Shandong University, Jinan 250100
摘要An accurate phase shift extraction method for generalized phase-shifting interferometry is suggested. Based on the nearly random phase distribution of the diffraction field of the object, a singular formula is derived to calculate the unknown phase shift without the requirements of an iteration process or the selection of the correct value from two or more possible phase shift solutions as needed before. This method can be used in the cases of two or more frames with both smooth and diffusing object surfaces. Computer simulations and optical experiments have satisfactorily verified the efficiency and accuracy of this method.
Abstract：An accurate phase shift extraction method for generalized phase-shifting interferometry is suggested. Based on the nearly random phase distribution of the diffraction field of the object, a singular formula is derived to calculate the unknown phase shift without the requirements of an iteration process or the selection of the correct value from two or more possible phase shift solutions as needed before. This method can be used in the cases of two or more frames with both smooth and diffusing object surfaces. Computer simulations and optical experiments have satisfactorily verified the efficiency and accuracy of this method.
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2010, Vol. 27 
