Abstract： The dynamic Monte Carlo program including a bombardment-induced Gibbsian segregation process was used to calculate angular distributions of individual elements from sputtered Cu0.5Pt0.5 alloy in the Ar ion energy range between 0.2 and 1.5keV. Calculated results show that for each investigated incident energy, the angular distribution of the Pt clement is more forward-pointed than that of the Cu one; the reason may be that different percentage of sputtered atoms (37~45% of Pt and 12~19% of Cu) come from beneath the topmost layer.
ZHENG Liping;LI Risheng*;LI Mingyao;SHEN Weizu;LIN Junying;ZOU Zhiyi. Sputtering Angular Distributions of Individual Elements for Low-Energy Ar Ion Irradiation of PtCu Alloy[J]. 中国物理快报, 1991, 8(1): 44-47.
ZHENG Liping, LI Risheng*, LI Mingyao, SHEN Weizu, LIN Junying, ZOU Zhiyi. Sputtering Angular Distributions of Individual Elements for Low-Energy Ar Ion Irradiation of PtCu Alloy. Chin. Phys. Lett., 1991, 8(1): 44-47.
1991, Vol. 8 
