SEGREGATION EFFECT ON SURFACE COMPOSITION IN ALLOY SPUTTERING
ZHENG Liping1, LI Risheng2, LI Mingyao1, CUI Fuzhai3
1Shanghai Institute of Nuclear Research, Academia Sinica, P. O. Box 8204, Shanghai, 201800
2Institute of Metal Research, Academia Sinica, Shenyang, 110015
3Department of Engineering Physics, Tsinghua University, Beijing, 100084
SEGREGATION EFFECT ON SURFACE COMPOSITION IN ALLOY SPUTTERING
ZHENG Liping1;LI Risheng2;LI Mingyao1;CUI Fuzhai3
1Shanghai Institute of Nuclear Research, Academia Sinica, P. O. Box 8204, Shanghai, 201800
2Institute of Metal Research, Academia Sinica, Shenyang, 110015
3Department of Engineering Physics, Tsinghua University, Beijing, 100084
Abstract： The modified dynamic TCIS (Transport and atomic Collision cascade of energetic Ions an Solids) Monte Carlo program including the radiation-enhanced Gibbsian segregation (REGS) is employed to estimate the compositional distributions at surface of the Au0.56Cu0.44 alloy under 2keV Ar+ ion bombardment at high dose. The calculation results exhibit that the Au composition enriches in the first layer (74 at.%), depletes in the second layer (37 at.%) and gradually rises with depth to the bulk composition. The effect of the relation between sputter depth and segregation layer on the surface concentration of Au0.56Cu0.44 is also discussed.
1990, Vol. 7 
