Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique
BAI Su-Yuan1,2, TANG Zhen-An1, HUANG Zheng-Xing1, YU Jun1, WANG Jia-Qi1
1Department of Electronic Engineering, Dalian University of Technology, Dalian 1160242School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029
Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique
BAI Su-Yuan1,2;TANG Zhen-An1;HUANG Zheng-Xing1;YU Jun1;WANG Jia-Qi1
1Department of Electronic Engineering, Dalian University of Technology, Dalian 1160242School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029
摘要Thermal conductivity of submicron-thick aluminium oxide thin films prepared by middle frequency magnetron sputtering is measured using a transient thermo-reflectance technique. A three-layer model based on transmission line theory and the genetic algorithm optimization method are employed to obtain the thermal conductivity of thin films and the interfacial thermal resistance. The results show that the average thermal conductivity of 330--1000nm aluminium oxide thin films is 3.3Wm-1K-1 at room temperature. No significant thickness dependence is found. The uncertainty of the measurement is less than 10%.
Abstract：Thermal conductivity of submicron-thick aluminium oxide thin films prepared by middle frequency magnetron sputtering is measured using a transient thermo-reflectance technique. A three-layer model based on transmission line theory and the genetic algorithm optimization method are employed to obtain the thermal conductivity of thin films and the interfacial thermal resistance. The results show that the average thermal conductivity of 330--1000nm aluminium oxide thin films is 3.3Wm-1K-1 at room temperature. No significant thickness dependence is found. The uncertainty of the measurement is less than 10%.
(Nonelectronic thermal conduction and heat-pulse propagation in solids;thermal waves)
引用本文:
BAI Su-Yuan;TANG Zhen-An;HUANG Zheng-Xing;YU Jun;WANG Jia-Qi. Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique[J]. 中国物理快报, 2008, 25(2): 593-596.
BAI Su-Yuan, TANG Zhen-An, HUANG Zheng-Xing, YU Jun, WANG Jia-Qi. Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique. Chin. Phys. Lett., 2008, 25(2): 593-596.
[1] Lee S M and Cahill D G 1997 J. Appl. Phys. 812590 [2] Kading O W, Skurk H and Goodson K E 1994 Appl. Phys.Lett. 65 1629 [3] Hatta I, Sasuga Y, Kato R and Maesono A 1985 Rev.Sci. Instrum. 56 1643 [4] Huang Z X, Tang Z A, Xu Z Q, Ding H T and Gu Y Q 2004 Chin. Phys. Lett. 21 713 [5] Okuda M and Ohkubo S 1992 Thin Solid Film 213176 [6] Ujihara K 1972 J. Appl. Phys. 43 2376 [7] Chen G and Hui P 1999 Thin Solid Films 339 58 [8] Zhao Y M, Chen G and Wang S Z 2004 Thin Solid Films 450 352 [9] Stehfest H 1970 Commun. ACM 13 47 [10] Stark I, Stordeur M and Syrowatka F 1992 Thin SolidFilms 226 185 [11] Lee S M and Cahill D G 1995 Phys. Rev. B 52253 [12] Kato R, Maesono A and Tye R P 2001 Int. J.Thermophys. 22 617 [13] Behkam B, Yang Y and Asheghi M 2005 Int. J. HeatMass Trans. 48 2023
2008, Vol. 25 
