| 2008, Vol. 25(2): 593-596 DOI: | ||
| Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique | ||
| BAI Su-Yuan1,2, TANG Zhen-An1, HUANG Zheng-Xing1, YU Jun1, WANG Jia-Qi1 | ||
| 1Department of Electronic Engineering, Dalian University of Technology, Dalian 1160242School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029 | ||
| 收稿日期 2007-09-27 修回日期 1900-01-01 | ||
| Supporting info | ||
[1] Lee S M and Cahill D G 1997 J. Appl. Phys. 81 [2] Kading O W, Skurk H and Goodson K E 1994 Appl. Phys. [3] Hatta I, Sasuga Y, Kato R and Maesono A 1985 Rev. [4] Huang Z X, Tang Z A, Xu Z Q, Ding H T and Gu Y Q 2004 [5] Okuda M and Ohkubo S 1992 Thin Solid Film 213 [6] Ujihara K 1972 J. Appl. Phys. 43 2376 [7] Chen G and Hui P 1999 Thin Solid Films 339 58 [8] Zhao Y M, Chen G and Wang S Z 2004 Thin Solid Films [9] Stehfest H 1970 Commun. ACM 13 47 [10] Stark I, Stordeur M and Syrowatka F 1992 Thin Solid [11] Lee S M and Cahill D G 1995 Phys. Rev. B 52 [12] Kato R, Maesono A and Tye R P 2001 Int. J. [13] Behkam B, Yang Y and Asheghi M 2005 Int. J. Heat |
||