On the Zero-Order Diffraction of Phase Mask
WEN Peng-yue, CUI Xiao-ming, LIU Hong-du, E. Y. B. Pun1 , P. S . Chung1
Department of Physics, Peking University, Beijing 100871
1 Department of Electronic Engineering, City University of Hong Kong
On the Zero-Order Diffraction of Phase Mask
WEN Peng-yue;CUI Xiao-ming;LIU Hong-du;E. Y. B. Pun1 ;P. S . Chung1
Department of Physics, Peking University, Beijing 100871
1 Department of Electronic Engineering, City University of Hong Kong
关键词 :
42.40.Lx ,
42.40.Eq
Abstract : The zero-order diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.
Key words :
42.40.Lx
42.40.Eq
出版日期: 1997-11-01
:
42.40.Lx
(Diffraction efficiency, resolution, and other hologram characteristics)
42.40.Eq
(Holographic optical elements; holographic gratings)
引用本文:
WEN Peng-yue;CUI Xiao-ming;LIU Hong-du;E. Y. B. Pun;P. S . Chung. On the Zero-Order Diffraction of Phase Mask[J]. 中国物理快报, 1997, 14(11): 830-833.
WEN Peng-yue, CUI Xiao-ming, LIU Hong-du, E. Y. B. Pun, P. S . Chung. On the Zero-Order Diffraction of Phase Mask. Chin. Phys. Lett., 1997, 14(11): 830-833.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1997/V14/I11/830
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