Non-Invasive Measurements of Thickness of Superconductor Films by Using Two-Resonant-Mode Rutile Resonator
JUNG Ho Sang, YANG Woo Il, LEE Jae Hun, SOHN Jae Min, CHOO Kee Nam, KIM Bong Goo, LEE Sang Young
1Department of Physics and Center for Wireless Transmission Technology, Konkuk University, Seoul 143-701, Korea 2Research Reactor Engineering Division Korea Atomic Energy Research Institute, Daejeon, 305-600, Korea
Non-Invasive Measurements of Thickness of Superconductor Films by Using Two-Resonant-Mode Rutile Resonator
JUNG Ho Sang, YANG Woo Il, LEE Jae Hun, SOHN Jae Min, CHOO Kee Nam, KIM Bong Goo, LEE Sang Young
1Department of Physics and Center for Wireless Transmission Technology, Konkuk University, Seoul 143-701, Korea 2Research Reactor Engineering Division Korea Atomic Energy Research Institute, Daejeon, 305-600, Korea
The film thickness should be known for extracting the intrinsic surface resistance from the effective surface resistance as measured by using the dielectric resonator method. Thicknesses of 70 nm to 360 nm are measured for YBa2Cu3O7-δ films in a non-invasive way by using the two-resonant-mode dielectric resonator (TDR) method. A rutile resonator with the respective resonant frequencies of 15.25-15.61 GHz and 15.10-15.37 GHz for the TE021 and the TE012 modes is used for this purpose. Differences between the values as measured by using the TDR technique and those measured by using a step profilometer appear to be less than 3%, which is smaller than the previous value of 5% as measured by using a 8.6 GHz single-resonance mode rutile resonator [Lee et al. J. Korean Phys. Soc. 54(2009)1619]. Merits of using the TDR method are discussed.
The film thickness should be known for extracting the intrinsic surface resistance from the effective surface resistance as measured by using the dielectric resonator method. Thicknesses of 70 nm to 360 nm are measured for YBa2Cu3O7-δ films in a non-invasive way by using the two-resonant-mode dielectric resonator (TDR) method. A rutile resonator with the respective resonant frequencies of 15.25-15.61 GHz and 15.10-15.37 GHz for the TE021 and the TE012 modes is used for this purpose. Differences between the values as measured by using the TDR technique and those measured by using a step profilometer appear to be less than 3%, which is smaller than the previous value of 5% as measured by using a 8.6 GHz single-resonance mode rutile resonator [Lee et al. J. Korean Phys. Soc. 54(2009)1619]. Merits of using the TDR method are discussed.
JUNG Ho Sang;YANG Woo Il;LEE Jae Hun;SOHN Jae Min;CHOO Kee Nam;KIM Bong Goo;LEE Sang Young. Non-Invasive Measurements of Thickness of Superconductor Films by Using Two-Resonant-Mode Rutile Resonator[J]. 中国物理快报, 2010, 27(8): 87405-087405.
JUNG Ho Sang, YANG Woo Il, LEE Jae Hun, SOHN Jae Min, CHOO Kee Nam, KIM Bong Goo, LEE Sang Young. Non-Invasive Measurements of Thickness of Superconductor Films by Using Two-Resonant-Mode Rutile Resonator. Chin. Phys. Lett., 2010, 27(8): 87405-087405.
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2010, Vol. 27 
