Low Power-Consumption and High Response Frequency Thermo-Optic Variable Optical Attenuators Based on Silicon-on-Insulator Materials
FANG Qing1 , CHEN Peng1 , XIN Hong-Li1 , WANG Chun-Xia2 , LI Fang1 , LIU Yu-Liang1
1 Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
2 Department of Physics, Wuhan University, Wuhan 430072
Low Power-Consumption and High Response Frequency Thermo-Optic Variable Optical Attenuators Based on Silicon-on-Insulator Materials
FANG Qing1 ;CHEN Peng1 ;XIN Hong-Li1 ;WANG Chun-Xia2 ;LI Fang1 ;LIU Yu-Liang1
1 Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
2 Department of Physics, Wuhan University, Wuhan 430072
关键词 ：
42.82.Et ,
42.30.Lr
Abstract ： A novel silicon-on-insulator thermo-optic variable optical attenuator with isolated grooves based on a multimode interference coupler principle is fabricated by the inductive coupled plasma etching technology. The maximum fibre-to-fibre insertion loss is lower than 2.2dB, the dynamic attenuation range is from 0 to 30dB in the wavelength range 1500--1600nm, and the maximum power consumption is only 140mW. The response frequency of the fabricated variable optical attenuator is about 30kHz. Compared to the variable optical attenuator without isolated grooves, the maximum power consumption decreases more than 220mW, and the response frequency rises are more than 20kHz.
Key words ：
42.82.Et
42.30.Lr
出版日期: 2005-06-01
:
42.82.Et
(Waveguides, couplers, and arrays)
42.30.Lr
(Modulation and optical transfer functions)
引用本文:
FANG Qing;CHEN Peng;XIN Hong-Li;WANG Chun-Xia;LI Fang;LIU Yu-Liang. Low Power-Consumption and High Response Frequency Thermo-Optic Variable Optical Attenuators Based on Silicon-on-Insulator Materials[J]. 中国物理快报, 2005, 22(6): 1452-1455.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2005/V22/I6/1452
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2005, Vol. 22 
