SUPERCONDUCTING FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA IONS DEPOSITION
WEN Haihu, SHENG Yanya, ZHANG Fengying, SHI Yicai, REN Zhaoxing, CAO Xiaowen
Institute of Plasma Physics, Academia Sinica, Hefei 230031
SUPERCONDUCTING FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA IONS DEPOSITION
WEN Haihu;SHENG Yanya;ZHANG Fengying;SHI Yicai;REN Zhaoxing;CAO Xiaowen
Institute of Plasma Physics, Academia Sinica, Hefei 230031
关键词 ：
74.75.+t ,
74.70.-b ,
74.10.+v
Abstract ： An Y-Ba-Cu-O superconducting film with onset temperature Tc (onset)= 91K and zero resistance temperature Tc (end)=81.4K has been obtained for the first time by wing electron cyclotron resonance (ECR) plasma ions deposition technique. The relationship between the composition of the film and the atmosphere as well as the distance between the target and substrate has also been given.
Key words ：
74.75.+t
74.70.-b
74.10.+v
出版日期: 1990-10-01
引用本文:
WEN Haihu;SHENG Yanya;ZHANG Fengying;SHI Yicai;REN Zhaoxing;CAO Xiaowen. SUPERCONDUCTING FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA IONS DEPOSITION
[J]. 中国物理快报, 1990, 7(10): 473-476.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1990/V7/I10/473
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