Preparation and Ferroelectric Properties of Double-Scale PZT Composite Piezoelectric Thick Film

Dense and crack-free double-scale lead zirconate titanate (Pb(Zr_0.52Ti_0.48)O₃, PZT) composite piezoelectric thick films have been successfully fabricated on Au/Cr/SiO₂/Si substrates by a modified sol-gel method. The XRD analysis indicates that the thick film possesses a single-phase perovskite-type structure. The SEM micrograph shows that the surface is crack-free and the cross section is dense and clear. The thickness of the PZT thick film is about 4μm. It also exhibits good ferroelectric properties, and has high direct current compression resistant properties. At the test frequency of 1kHz, the film has the coercive field of 50kV/cm, the saturation polarization of 54μC/cm² and the remnant polarization of 30μC/cm².