Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films
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Abstract
The evolution of microstructure and optical properties of TiO2 sculptured thin films under thermal annealing is reported. XRD, field emission SEM, UV-Vis-NIR spectra are employed to characterize the microstructural and optical properties. It is found that the optimum annealing temperature for linear birefringence is 500°C. The maximum of transmission difference for linear birefringence is up to 18%, which is more than twice of that in as-deposited thin films. In addition, the sample annealed at 500°C has a minimum of column angle about 12°C. The competitive process between the microstructural and optical properties is discussed in detail. Post-annealing is a useful method to improve the linear birefringence in sculptured thin films for practical applications.
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XIAO Xiu-Di, DONG Guo-Ping, QI Hong-Ji, FAN Zheng-Xiu, HE Hong-Bo, SHAO Jian-Da. Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films[J]. Chin. Phys. Lett., 2008, 25(6): 2181-2184.
XIAO Xiu-Di, DONG Guo-Ping, QI Hong-Ji, FAN Zheng-Xiu, HE Hong-Bo, SHAO Jian-Da. Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films[J]. Chin. Phys. Lett., 2008, 25(6): 2181-2184.
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XIAO Xiu-Di, DONG Guo-Ping, QI Hong-Ji, FAN Zheng-Xiu, HE Hong-Bo, SHAO Jian-Da. Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films[J]. Chin. Phys. Lett., 2008, 25(6): 2181-2184.
XIAO Xiu-Di, DONG Guo-Ping, QI Hong-Ji, FAN Zheng-Xiu, HE Hong-Bo, SHAO Jian-Da. Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films[J]. Chin. Phys. Lett., 2008, 25(6): 2181-2184.
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