Demonstration of GaN/InGaN Light Emitting Diodes on (100) β-Ga₂O₃ Substrates by Metalorganic Chemical Vapour Deposition

The growth and fabrication of GaN/InGaN multiple quantum well (MQW) light emitting diodes (LEDs) on (100) β-Ga₂O₃ single crystal substrates by metal-organic chemical vapour deposition (MOCVD) technique are reported. x-ray diffraction (XRD) θ-2θ scan spectroscopy is carried out on the GaN buffer layer grown on a (100) β-Ga₂O₃ substrate. The spectrum presents several sharp
peaks corresponding to the (100) β-Ga₂O₃ and (004) GaN. High-quality (0002) GaN material is obtained. The emission characteristics of the GaN/InGaN MQW LED are measurement. The first green LED on β-Ga₂O₃ with vertical current injection is demonstrated.