optical, Structural and Laser-Induced Damage Threshold Properties of HfO₂ Thin Films Prepared by Electron Beam Evaporation

We prepare HfO₂ thin films by electron beam evaporation technology. The samples are annealed in air after deposition. With increasing annealing temperature, it is found that the absorption of the samples decreases firstly and then increases. Also, the laser-induced damage threshold (LIDT) increases firstly and then decreases. When annealing temperature is 473K, the sample has the highest LIDT of 2.17J/cm², and the lowest absorption of 18ppm. By investigating the optical and structural characteristics and their relations to LIDT, it is shown that the principal factor dominating the LIDT is absorption.