Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film

Pb(Zr_0.53,Ti_0.47)O₃ (PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method and their longitudinal piezoelectric coefficients are analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has the better crystallization, with d₃₃ and density much larger than those of PZT thin films. A piezoelectric microcantilever actuated by a 4-μm-thick PZT film is fabricated and its displacement is measured in different frequencies and voltages. The displacement increases linearly with the increasing bias, and the maximum displacement of 0.544μm is observed at 30kHz for 5V bias. The resonant frequency obtained in the experiment matches quite well with the theoretical result, and it is shown that the resonant frequency of PZT microcantilever could be controlled and predicated.