Enhanced p-Type ZnO Films through Nitrogen and Argentum Codoping Grown by Ultrasonic Spray Pyrolysis

The N--Ag codoped ZnO films are deposited on quartz glass substrates by ultrasonic spray pyrolysis technology. The results indicate that the p-type conductivity in ZnO films is greatly enhanced by the double acceptor codoping of N and Ag compared with that of Ag- and N-monodoped ZnO films, and the N--Ag codoped low-resistivity p-type ZnO films with the resistivity of 1.05Ω.cm, relatively high carrier concentration of 5.43×10¹⁷ cm^-3, and Hall mobility of 10.09cm²V^-1s^-1 are obtained under optimized conditions. This achievement confirms that p-type ZnO with acceptable properties for optoelectronic applications could be realized by simultaneous codoping with two potential acceptors.