SOI-Based 16×16 Thermo-Optic Waveguide Switch Matrix

A 16×16 thermo-optic waveguide switch matrix has been designed and fabricated on silicon-on-insulator wafer. For reducing device length, blocking switch matrix configuration is chosen. The building block of the matrix is a 2×2 switch cell with a Mach--Zehnder interferometer configuration, where a multi-mode interferometer serves as splitter/combiners. Spot size converters and isolating grooves are integrated on the same chip to reduce loss and power consumption. Average power consumption of the switch cell is 220mW. The switching time of a switch cell is less than 3μs.