Range Distribution Parameters of Implanted ¹⁹F Ions in Ni_0.8Fe_0.2 Alloy

Depth profiles of fluorine in ¹⁹F⁺ implanted Ni_0.8Fe_0.2a alloy have been accurately measured by using ¹⁹F(p,α γ)¹⁶O resonance nuclear reaction at E_R = 872.lkeV. A proper convolution calculation method was used to extract the true distribution of fluorine from the experimental excitation yield curves. The range parameters, R_p and ΔR_p, were thereby obtained and compared with those simulated wit TRIM90 code. It shows that the experimental R_p values agree with the Monte Carlo simulation values very well, while the experimental Δ R_p values are systematically larger than the calculation values.