Synthesis of β-FeSi2 Film by Reactive Deposition-Solid Phase Epitaxy
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Abstract
Reactive deposition-solid phase epitaxy has been developed for the epitaxial growth of thick β-FeSi2film. Compared with the solid phase epitaxy, the crystal quality was improved. The orientation relationship mainly depends on the depositing condition. Observation by transmission electron microscope revealed the polycrystalline nature and the mean crystallite size was about 200nm.
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WANG Lianwei, SHEN Qinwo, CHEN Xiangdong, LIN Xian, LIN Chenglu, ZOU Shichang. Synthesis of β-FeSi2 Film by Reactive Deposition-Solid Phase Epitaxy[J]. Chin. Phys. Lett., 1995, 12(5): 301-304.
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WANG Lianwei, SHEN Qinwo, CHEN Xiangdong, LIN Xian, LIN Chenglu, ZOU Shichang. Synthesis of β-FeSi2 Film by Reactive Deposition-Solid Phase Epitaxy[J]. Chin. Phys. Lett., 1995, 12(5): 301-304.
|
WANG Lianwei, SHEN Qinwo, CHEN Xiangdong, LIN Xian, LIN Chenglu, ZOU Shichang. Synthesis of β-FeSi2 Film by Reactive Deposition-Solid Phase Epitaxy[J]. Chin. Phys. Lett., 1995, 12(5): 301-304.
|
WANG Lianwei, SHEN Qinwo, CHEN Xiangdong, LIN Xian, LIN Chenglu, ZOU Shichang. Synthesis of β-FeSi2 Film by Reactive Deposition-Solid Phase Epitaxy[J]. Chin. Phys. Lett., 1995, 12(5): 301-304.
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