Observation of the Si(100)-(2 x 2) Phase and Measurements of Low Energy Electron Diffraction I-V Curves

A new phase of (2x2) has been observed as a result of hydrogen ion sputter etching on a clean reconstructed Si(100)-(2x1) surface using low energy electron diffraction (LEED). It has been found that the (2x1) surface first transformed into a metastable c( 4 x 4 ) phase following hydrogen ion etching and after further anneal of the sample, a (2x2) phase can be obtained. Intensity vs electron energy (I-V) curves for the
Si(100)-(2x2) pattern have been measured using a special video LEED system.