FRACTAL STRUCTURE APPEARED IN ION-IMPLANTED a-Ge/Ag BILAYER FILMS AFTER ANNEALING

The agglomeration in ion-implanted a-Ge/Ag bilayer films has been investigated by use of transmission electron microscopy (TEM). There are two kinds of fractal structures, one of which is soot - like with fractal dimension (FD) of 1.515, the other is snow - flake - like with FD of 1.797. The result is compared with that of the unimplanted film, and the mechanism of the occurrence of fractal regions is also discussed.