Analysis of Frequency Spectrum of Laser-Induced Vibration of Microbeam Resonators

The vibration phenomenon during pulsed laser heating of micro-beams is investigated. The beam is made of silicon and is heated by a laser pulse with a non-Gaussian temporal profile and with an ultrashort pulse duration of 2ps, which incites vibration due to the thermoelastic damping effect. This coupled thermoelastic problem is solved using an analytical--numerical technique based on the Laplace transformation. The damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are also examined and discussed.