EFFECT OF H+-IONS IMPLANTATION AND Ar+-IONS BOMBARDMENT ON THE PROPERTIES OF LiNbO3 CRYSTAL SURFACES

  • The H+-ions implantation and Ar+-ions bombardment did not cause near-surface decomposition of LiNbO3, but it resulted in the alteration of the physical properties. The XPS (x-ray photoelectron energy spectroscopy) measurement was used to characterize the properties of the radiation damaged surface layer of LiNbO3.
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