Effects of Hydrogen Ion Bombardment on Carbon TerminatedSi (111) Surface Studied by LEED and AES

Etching effects of hydrogen ions on the Si(111)-(1x1)C surface have been studied by LEED (low-energy electron diffraction) and AES (Auger electron spectroscopy). It has been found that hydrogen ions, can break the carbon-silicon covalent bonds and cause a phase transition of Si(111)-(1x1)C to the reconstructed Si(111)-(7x7) structure.