Probe Contamination Effect in Silane Plasma and its Improvement
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Abstract
The contamination behavior of Langmuir probe in silane glow discharge plasma are discussed. A hot electrical probe is suggested to improve the diagnostics of SiH4 plasma. Results show the safe duration for reliable measurements of electron temperature can be as long as 40min by this method.
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Cite this article:
XI Zhonghe, ZHANG Guanghua, YANG Fan, XU Fang, ZHANG Qiang. Probe Contamination Effect in Silane Plasma and its Improvement[J]. Chin. Phys. Lett., 1993, 10(2): 100-102.
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XI Zhonghe, ZHANG Guanghua, YANG Fan, XU Fang, ZHANG Qiang. Probe Contamination Effect in Silane Plasma and its Improvement[J]. Chin. Phys. Lett., 1993, 10(2): 100-102.
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XI Zhonghe, ZHANG Guanghua, YANG Fan, XU Fang, ZHANG Qiang. Probe Contamination Effect in Silane Plasma and its Improvement[J]. Chin. Phys. Lett., 1993, 10(2): 100-102.
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XI Zhonghe, ZHANG Guanghua, YANG Fan, XU Fang, ZHANG Qiang. Probe Contamination Effect in Silane Plasma and its Improvement[J]. Chin. Phys. Lett., 1993, 10(2): 100-102.
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