Preparation and Characterization of Hybrid ZnO/Ormosils Films

Hybrid ZnO/ormosils films are prepared by the sol-gel method. A FT-IR spectrometer, 900UV/VIS/NIR spectrophotometer, atomic force microscope, and ellipsometer are employed to investigate microstructure and optical properties of the films fired at different temperatures. The results show that the films with high transmittance and low surface roughness could be obtained at the heat-treatment temperature of 150°C, the refractive index and thickness of the film are 1.413, 2.11μm, respectively. Higher temperatures (350°C, 550°C) change the film microstructure severely, and then decrease the transmittance of the films.