Sputtering Angular Distributions of Individual Elements for Low-Energy Ar Ion Irradiation of PtCu Alloy

The dynamic Monte Carlo program including a bombardment-induced Gibbsian segregation process was used to calculate angular distributions of individual elements from sputtered Cu_0.5Pt_0.5 alloy in the Ar ion energy range between 0.2 and 1.5keV. Calculated results show that for each investigated incident energy, the angular distribution of the Pt clement is more forward-pointed than that of the Cu one; the reason may be that different percentage of sputtered atoms (37~45% of Pt and 12~19% of Cu) come from beneath the topmost layer.