Aggregation Process in the Ion Irradiated Solid Films

A fractal aggregation process in the ion irradiated films was recognized. The process was intrinsic of interaction of ions with solids and sincerely modelled by the cluster diffusion-limited-aggregation model. The energetic ions not only drive the atoms and clusters in the area of collision cascade in motion which may be modelled as random walks, but also create vacancies and voids which contribute to the aggregation process. The process was also of percolation characteristic with a fractal dimension 1.82 at the critical point.