SEGREGATION EFFECT ON SURFACE COMPOSITION IN ALLOY SPUTTERING

  • Published Date: February 28, 1990
  • The modified dynamic TCIS (Transport and atomic Collision cascade of energetic Ions an Solids) Monte Carlo program including the radiation-enhanced Gibbsian segregation (REGS) is employed to estimate the compositional distributions at surface of the Au0.56Cu0.44 alloy under 2keV Ar+ ion bombardment at high dose. The calculation results exhibit that the Au composition enriches in the first layer (74 at.%), depletes in the second layer (37 at.%) and gradually rises with depth to the bulk composition. The effect of the relation between sputter depth and segregation layer on the surface concentration of Au0.56Cu0.44 is also discussed.
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