GROWTH OF DIAMOND-LIKE FILMS BY DC PLASMA CHEMICAL VAPOR DEPOSITION
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ZHAN Rujuan,
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GAO Kelin,
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ZOU Zuping,
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WANG Yanxia,
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LIU Jiezhou,
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XIANG Zhilin,
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LIU Hongtu,
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WU Zhiqiang,
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YE Jian,
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ZHOU Guien,
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WANG Changsui
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Abstract
Diamond-like films have been deposited by dc plasma chemical vapor deposition (CVD). During deposition, the characteristics of the plasma have been measured by means of the Langmuir single probe. The structure of the deposits has been studied by X-ray diffraction, Raman spectroscopy and Fourier transform infrared spectroscopy.
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ZHAN Rujuan, GAO Kelin, ZOU Zuping, WANG Yanxia, LIU Jiezhou, XIANG Zhilin, LIU Hongtu, WU Zhiqiang, YE Jian, ZHOU Guien, WANG Changsui. GROWTH OF DIAMOND-LIKE FILMS BY DC PLASMA CHEMICAL VAPOR DEPOSITION[J]. Chin. Phys. Lett., 1990, 7(10): 445-448.
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ZHAN Rujuan, GAO Kelin, ZOU Zuping, WANG Yanxia, LIU Jiezhou, XIANG Zhilin, LIU Hongtu, WU Zhiqiang, YE Jian, ZHOU Guien, WANG Changsui. GROWTH OF DIAMOND-LIKE FILMS BY DC PLASMA CHEMICAL VAPOR DEPOSITION[J]. Chin. Phys. Lett., 1990, 7(10): 445-448.
|
ZHAN Rujuan, GAO Kelin, ZOU Zuping, WANG Yanxia, LIU Jiezhou, XIANG Zhilin, LIU Hongtu, WU Zhiqiang, YE Jian, ZHOU Guien, WANG Changsui. GROWTH OF DIAMOND-LIKE FILMS BY DC PLASMA CHEMICAL VAPOR DEPOSITION[J]. Chin. Phys. Lett., 1990, 7(10): 445-448.
|
ZHAN Rujuan, GAO Kelin, ZOU Zuping, WANG Yanxia, LIU Jiezhou, XIANG Zhilin, LIU Hongtu, WU Zhiqiang, YE Jian, ZHOU Guien, WANG Changsui. GROWTH OF DIAMOND-LIKE FILMS BY DC PLASMA CHEMICAL VAPOR DEPOSITION[J]. Chin. Phys. Lett., 1990, 7(10): 445-448.
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