XPS STUDY OF ION IRRADIATED Cu/SiO2 INTERFACES
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Abstract
XPS study was carried out on Cu/SiO2 interface following the irradiation of 6.0MeV Si ion beam. The chemical shift in the copper spectra reveals for the first time the existence of a chemically bonded structure in the interface region resulting from ion irradiation.
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LIU Jiarui, CHEN Zhengyuan, GUO Xiaodong. XPS STUDY OF ION IRRADIATED Cu/SiO2 INTERFACES[J]. Chin. Phys. Lett., 1989, 6(3): 135-137.
LIU Jiarui, CHEN Zhengyuan, GUO Xiaodong. XPS STUDY OF ION IRRADIATED Cu/SiO2 INTERFACES[J]. Chin. Phys. Lett., 1989, 6(3): 135-137.
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LIU Jiarui, CHEN Zhengyuan, GUO Xiaodong. XPS STUDY OF ION IRRADIATED Cu/SiO2 INTERFACES[J]. Chin. Phys. Lett., 1989, 6(3): 135-137.
LIU Jiarui, CHEN Zhengyuan, GUO Xiaodong. XPS STUDY OF ION IRRADIATED Cu/SiO2 INTERFACES[J]. Chin. Phys. Lett., 1989, 6(3): 135-137.
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