EFFECT OF MAGNETIC FIELD ON THE CHARACTERISTIC OF SILICON SINGLE CRYSTAL
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Abstract
The growth striation, the resistant homogeneity, and the oxygen concentration of silicon single crystal grown by both Transverse Magnetic Czochralski (MCZ) and Czochralski growth methods (CZ) were investigated. The oxygen concentration in MCZ silicon is more uniform and controllable. It is concluded that the Magnetic Czochralski method is an effective method to improve the quality of silicon single crystal.
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MAO Zaixian, MA Zhenhong, ZHOU Shiren, YE Shuichi. EFFECT OF MAGNETIC FIELD ON THE CHARACTERISTIC OF SILICON SINGLE CRYSTAL[J]. Chin. Phys. Lett., 1989, 6(11): 507-510.
MAO Zaixian, MA Zhenhong, ZHOU Shiren, YE Shuichi. EFFECT OF MAGNETIC FIELD ON THE CHARACTERISTIC OF SILICON SINGLE CRYSTAL[J]. Chin. Phys. Lett., 1989, 6(11): 507-510.
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MAO Zaixian, MA Zhenhong, ZHOU Shiren, YE Shuichi. EFFECT OF MAGNETIC FIELD ON THE CHARACTERISTIC OF SILICON SINGLE CRYSTAL[J]. Chin. Phys. Lett., 1989, 6(11): 507-510.
MAO Zaixian, MA Zhenhong, ZHOU Shiren, YE Shuichi. EFFECT OF MAGNETIC FIELD ON THE CHARACTERISTIC OF SILICON SINGLE CRYSTAL[J]. Chin. Phys. Lett., 1989, 6(11): 507-510.
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