A SIMULATION STUDY OF LOW ENERGY SPUTTERING ANGULAR DISTRIBUTION

The low energy sputtering angular distributions are simulated in inert gas ion-metal target combinations. It is found that the angular distribution of PKAs trends to an under-cosine shape, while the angular distribution of SKAs shows either a cosine one or an over-cosine one: the formation of the under-cosine sputtering angular distribution seems to come from the smaller mass ratio and the lower incident energy.