ION ENDUCED ADHESION BETWEEN METALS AND OXIDES

The enhancement of adhesion between deposited metal layers ( Ti and Cu) and the oxide substrates at RT and 300°c respectively was studied by argon ion irradiation to various doses. The experimental results showed that the adhesive strength increased after a threshold dose irradiation and reached as aturation value at higher doses in all metal/oxide pairs. RBS spectra showed that chemical reaction had taken place in Ti /oxide case, while in Cu/oxide case, both RBS and XPS analysis showed that no evidence of such reaction had been induced.