Impurity-Free Vacancy Diffusion Technique for InGaAsP/InP Multiple Quantum Well Laser Structure

Bandgap tuning of the InGaAsP/InP multiple quantum well (MQW) laser structure by the impurity-free vacancy diffusion (IFVD) is investigated using photoluminescence. It has been demonstrated that the effects of the plasma bombardment to the sample surface involved in the IFVD technique can enhance the intermixing of the InGaAsP/InP MQW laser structure. The reliability of the IFVD technique, particularly the effects of the surface decomposition and the intrinsic defects formed in the growth or preparation of the wafer, has been discussed.