Assistant Anode in a Cathodic Arc Plasma Source

The performance and characteristics of a cathodic arc plasma source, consisting of a titanium cathode, an anode with and without a tungsten mesh, and a coil producing a focusing magnetic field between the anode and cathode, are investigated. The high transparency and large area of the mesh allow a high plasma flux to penetrate the anode from the cathodic arc. The mesh helps to decrease the arc resistance and the ignition voltage of the cathodic arc in the focusing magnetic field, and increase the life of the source. which means that the source makes the cathodic arc easily and greatly stabilized during the operation when a focusing magnetic field exists in the source.