Preparation of TiOx/γ-AI2O3 Catalyst on Powdery γ-AI2O3 by Using Reactive Sputtering Deposition
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Abstract
A layer of TiOx was deposited on powdery γ-AI2O3 by using flat-target magnetron sputtering in microwave electron cyclotron resonance plasma. A vibrator was developed to coat the γ-AI2O3 particles evenly by TiOx. The conversion efficiency of methane and both the yield and the selectivity of C2 hydrocarbons and C2H2 were revealed to be superior to that by conventional chemical method. The use of vibrator is effective.
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LU Wen-qi, XU Zhen-feng, DENG Xin-lu, XU Jun, ZHANG Jia-liang, ZHU Ai-min, GONG Wei-min. Preparation of TiOx/γ-AI2O3 Catalyst on Powdery γ-AI2O3 by Using Reactive Sputtering Deposition[J]. Chin. Phys. Lett., 1999, 16(6): 426-427.
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LU Wen-qi, XU Zhen-feng, DENG Xin-lu, XU Jun, ZHANG Jia-liang, ZHU Ai-min, GONG Wei-min. Preparation of TiOx/γ-AI2O3 Catalyst on Powdery γ-AI2O3 by Using Reactive Sputtering Deposition[J]. Chin. Phys. Lett., 1999, 16(6): 426-427.
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LU Wen-qi, XU Zhen-feng, DENG Xin-lu, XU Jun, ZHANG Jia-liang, ZHU Ai-min, GONG Wei-min. Preparation of TiOx/γ-AI2O3 Catalyst on Powdery γ-AI2O3 by Using Reactive Sputtering Deposition[J]. Chin. Phys. Lett., 1999, 16(6): 426-427.
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LU Wen-qi, XU Zhen-feng, DENG Xin-lu, XU Jun, ZHANG Jia-liang, ZHU Ai-min, GONG Wei-min. Preparation of TiOx/γ-AI2O3 Catalyst on Powdery γ-AI2O3 by Using Reactive Sputtering Deposition[J]. Chin. Phys. Lett., 1999, 16(6): 426-427.
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