STUDIES ON SEMICONDUCTOR SURFACE PARAMETER BY USE OF SAW TECHNIQUE

Using the concepts of continuity of interface impedance, the changes of both the velocity and attenuation of surface acoustic wave (SAW) caused by acousto-electric interaction are considered layer by lager under different semicon-ductor surface conditions for the piezoelectric-insulator-semiconductor(PIS) structures. Surface densities of states and fixed charge densities are evaluated by computer fitting and the results agree well with those obtained by other methods.