Novel Folding Large-Scale Optical Switch Matrix with Total Internal Reflection Mirrors on Silicon-on-Insulator by Anisotropy Chemical Etching

A compact optical switch matrix was designed, in which light circuits were folded by total internal reflective (TIR) mirrors. Two key elements, 2×2 switch and TIR mirror, have been fabricated on silicon on-insulator wafer by anisotropy chemical etching. The 2×2 switch showed very low power consumption of 140mW and a very high speed of 8±1μs. An improved design for the TIR mirror was developed, and the fabricated mirror with smooth and vertical reflective facet showed low excess loss of 0.7±0.3dB at 1.55μm.