Influence of LiB₃O₅ Structure on Microstructure and Optical Properties of ZrO₂ Thin Films repared by Electron Beam Evaporation

ZrO₂ thin films were deposited by using an electron beam evaporation technique on three kinds of lithium triborate (LiB₃O₅ or LBO) substrates with the surfaces at specified crystalline rientations. The influences of the LBO structure on the structural and optical properties of ZrO₂ thin films are studied by spectrophotometer and x-ray diffraction. The results indicate that the substrate structure has obvious effects on the structural and optical properties of the film: namely, the ZrO₂ thin film deposited on the X-LBO, Y-LBO and Z-LBO orients to m(-212), m(021) and o(130) directions. It is also found that the ZrO₂ thin film with m(021) has the highest refractive index and the least lattice misfit.