Graded Index 532HR/1064HT Filter by Glancing Angle Deposition

Glancing angle deposition is a novel method to prepare graded index
coatings. By using this method and physical vapour deposition, ZrO ₂
is used to engineer graded index filter on BK7 glass substrate. Controlling the deposition rate and the periodic oscillation of oblique angle of deposited material, a 10-period graded index ZrO₂ filter with high reflection near 532nm and high transmittance at wavelength 1064nm is fabricated. The causes of
difference between the theoretical and experimental results are discussed in detail. The material properties and electron gun nonlinearity are possibly the main origins of the difference, which result in the variations in both thickness control and deposition rate of the film material.