1Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027 2Microelectronics R&D Center, Chinese Academy of Sciences, Beijing 100029
We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160×160 array with a 120μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.
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