Optimized Optomechanical Micro-Cantilever Array for Uncooled Infrared Imaging

We present a new substrate-free bimaterial cantilever array made of SiN_x and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A
160×160 array with a 120μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.