SILC during NBTI Stress in PMOSFETs with Ultra-Thin SiON Gate Dielectrics

  • Received Date: November 13, 2007
  • Published Date: March 31, 2008
  • Negative bias temperature instability (NBTI) and stress-induced leakage current (SILC) both are more serious due to the aggressive scaling lowering of devices. We investigate the SILC during NBTI stress in PMOSFETs with ultra-thin gate dielectrics. The SILC sensed range from -1V to 1V is divided into four parts: the on-state SILC, the near-zero SILC, the off-state SILC sensed at lower positive voltages and the one sensed at higher positive voltages. We develop a model of tunnelling assisted by interface states and oxide bulk traps to explain the four different parts of SILC during NBTI stress.
  • Article Text

  • [1] Wen S J, Hinh L and Puchner H 2003 IntegratedReliability Workshop (California 20--23 October 2003) 147
    [2] Jeon C H, Kim S Y, Kim H S and Rim C B 2002 Integrated Reliability Workshop (California 21--24 October 2002)130
    [3] Chen Y F, Lin M H, Chou C H, Chang W C, Huang S C, ChangY J, Fu K Y, Lee M T, Liu C H and Fan S K 2000 IntegratedReliability Workshop (California 23--26 October 2000) 98
    [4] Baglee D A and Smayling M C 1985 InternationalElectron Devices Meeting (Washington DC 1--4 December 1985) 624
    [5] Naruke K, Taguchi S and Wada M 1988 InternationalElectron Devices Meeting (Washington DC 11--14 December 1988) 424
    [6] Ielmini D, Spinelli A S, Lacaita A L and Ghidini G 2000 International Reliability Physics Symposium (California10--13 April 2000) 55
    [7] Tsujikawa S 2007 IEEE Trans. Electron Devices 54 524
    [8] Cao Y R, Ma X H, Hao Y, Zhang Y, Yu L, Zhu ZH W and Chen H F 2007 Chin. Phys. 16 1140
    [9] Chen G, Li M F, Ang C H, Zheng J Z and Kwong D L 2002 IEEE Electron Dev. Lett. 23 734
    [10] Rashkeev S N, Fleetwood D M, Schrimpf R D and Pantelides S T 2001 IEEE Trans. Nucl. Sci. 48 2086
    [11] Krishnan A T, Chakravarthi S, Nicollian P, Reddy V and Krishnan S2006 Appl. Phys. Lett. 88 153518-1
    [12] Yang J B, Chen T P, Tan S S and Chan L 2006 Appl. Phys.Lett. 88 172109-1
    [13] Zhu S Y and Nakajima A 2006 J. Appl. Phys. 99 064510-1
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