High Resolution Elastic Recoil Detection Analysis with Q3D Magnetic Spectrometer

Elastic recoil detection analysis technique with ΔE - E particle identification and Q3D momentum analysis has been developed to determine high resolution depth profiles in thin foils and multilayer systems. A depth resolution of 1.2nm was achieved at the surface of the samples using a high quality 100MeV ¹²⁷I beam. The method was applied to depth profile analysis of C/LiF multilayers, superconductor and GaN foil samples.