Electron Field Emission from Nitrogen Ion Implantat ion Diamond-Like Carbon Film

The electron field emission from both diamond-like carbon(DLC) and nitrogen doped diamond-like carbon films by ion implantation was studied. The DLC films were deposited on a molybdenum layer coated on ceramic by using pulsed laser deposition. The field emission measurements show that the incorporation of nitrogen in DLC films can increase current density and lower the turn-on field from 9 to 4 V/μm, which indicate that the nitrogen doped DLC films have a potential application as field emission materials for flat panel displays.